DocumentCode

1971268

Title

Multiple delta doping in aggressively scaled PHEMTs

Author

Kalna, K. ; Asenov, A.

Author_Institution

University of Glasgow, UK

fYear

2001

fDate

11-13 September 2001

Firstpage

319

Lastpage

322

Keywords

Doping; Electron mobility; HEMTs; Indium; Linearity; MODFETs; Monte Carlo methods; PHEMTs; Semiconductor process modeling; Transconductance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

conf

DOI

10.1109/ESSDERC.2001.195265

Filename

1506647