DocumentCode
1971670
Title
High harmonic generation by plasmonic enhancement of femtosecond laser pulses
Author
Kim, Seungchul ; Park, In-Yong ; Kim, Seung-Woo
Author_Institution
Ultrafast Opt. for Ultraprecision Technol. Group, Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
fYear
2009
fDate
30-3 Aug. 2009
Firstpage
1
Lastpage
2
Abstract
Plasmonic enhancement of femtosecond laser pulses using a bow-tie metallic nanostructure enables the high harmonic generation of EUV radiation for high-resolution lithography, imaging, and spectroscopy.
Keywords
optical harmonic generation; optical pulse generation; EUV radiation; bow-tie metallic nanostructure; femtosecond laser pulses; high harmonic generation; high-resolution lithography; imaging; plasmonic enhancement; spectroscopy; Free electron lasers; Frequency conversion; Gas lasers; Optical harmonic generation; Optical pulse generation; Optical pulses; Plasmons; Pulse amplifiers; Ultrafast optics; Ultraviolet sources; High harmonic generation; coherent EUV radiation; localized field enhancement; surface plasmon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-3829-7
Electronic_ISBN
978-1-4244-3830-3
Type
conf
DOI
10.1109/CLEOPR.2009.5292208
Filename
5292208
Link To Document