• DocumentCode
    1971934
  • Title

    A Self-aligned Bottom Gate Poly-Si TFT Technology

  • Author

    Zhang, Shengdong ; Han, Ruqi ; Chan, Mansun

  • Author_Institution
    Peking University, China
  • fYear
    2001
  • fDate
    11-13 September 2001
  • Firstpage
    475
  • Lastpage
    478
  • Keywords
    Application specific integrated circuits; Crystallization; Fabrication; Flat panel displays; Microelectronics; Parasitic capacitance; Partial response channels; Surfaces; Temperature; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2001. Proceeding of the 31st European
  • Print_ISBN
    2-914601-01-8
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2001.195304
  • Filename
    1506686
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1971934