DocumentCode
1971947
Title
Effects of Grain-Boundaries in Excimer-Laser Crystallized Poly-Si Thin-Film Transistors
Author
Ishihara, Ryoichi
Author_Institution
Delft University of Technology, The Netherlands
fYear
2001
fDate
11-13 September 2001
Firstpage
479
Lastpage
482
Keywords
Active matrix liquid crystal displays; Annealing; Crystallization; Driver circuits; Etching; Grain boundaries; Grain size; Plasma temperature; Semiconductor films; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195305
Filename
1506687
Link To Document