DocumentCode
1973686
Title
Fabrication of photonic crystal cavity laser using a combined lithography of laser holography and focused ion beam
Author
Ahn, Sungmo ; Kim, Sihan ; Jeon, Heonsu ; Kim, Hyo Jin
Author_Institution
Dept. of Phys. & Astron., Seoul Nat. Univ., Seoul, South Korea
fYear
2009
fDate
30-3 Aug. 2009
Firstpage
1
Lastpage
2
Abstract
To enable a large scale and high throughput fabrication of photonic crystal (PC) cavity lasers, we combined laser holography (for the background PC generation) and focused ion beam (for cavity formation). The resultant lasers exhibited threshold and output powers comparable to those of electron-beam generated ones.
Keywords
focused ion beam technology; holography; laser cavity resonators; optical fabrication; photolithography; photonic crystals; combination lithography; focused ion beam; laser holography; optical fabrication; photonic crystal cavity laser; Holography; Indium phosphide; Ion beams; Laser excitation; Laser theory; Lithography; Optical device fabrication; Photonic crystals; Semiconductor lasers; Throughput; combination lithography; focused ion beam; laser holography; photonic crystal cavity laser;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-3829-7
Electronic_ISBN
978-1-4244-3830-3
Type
conf
DOI
10.1109/CLEOPR.2009.5292298
Filename
5292298
Link To Document