DocumentCode
1973771
Title
Femtosecond laser processing of fused silica to create integrated microsystems
Author
Bellouard, Yves
Author_Institution
Micro- & Nano- Scale Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
fYear
2009
fDate
30-3 Aug. 2009
Firstpage
1
Lastpage
1
Abstract
Low-energy femtosecond laser pulses can be used to introduce various functionalities in fused silica that can be combined or distributed to form integrated microsystems suitable for optofluidics and optomechanics applications.
Keywords
high-speed optical techniques; laser materials processing; femtosecond laser processing; fused silica; integrated microsystems; optofluidics; optomechanics; Biological materials; Glass; Nanostructured materials; Optical materials; Optical pulses; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-3829-7
Electronic_ISBN
978-1-4244-3830-3
Type
conf
DOI
10.1109/CLEOPR.2009.5292301
Filename
5292301
Link To Document