DocumentCode

1980084

Title

Characterization of AiGaP/GaP Heterostructures Grown by MOVPE

Author

Adomi, K. ; Noto, N. ; Nakamura, A. ; Takenaka, T.

Author_Institution

Shin-Etsu Handotai Co., Ltd., Japan

fYear

1992

fDate

8-11 Jun 1992

Firstpage

208

Lastpage

209

Keywords

Compressive stress; Epitaxial growth; Epitaxial layers; Internal stresses; Predictive models; Semiconductor process modeling; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.665020

Filename

665020