The influence of the electrode multilayer structure on the quartz resonator parameters

The influence of the Cr/Au multilayer electrode structure on the electrical parameters of AT-cut quartz resonators was investigated and the results are discussed. Using the Ballato´s exact transmission-line analogs applied to a finite plate with non-distribution of motion, the effective mass-loading and the coupling coefficient were computed. The analysis of the harmonic dependence of the resonator characteristics reveals significant changes of these parameters as a function of electrode configuration. The behavior of the resonator characteristics for different electrode configurations has been explained by internal stresses in electrodes and at the piezoelectric substrate-electrode interface. The three electrode configurations used in experiments have been characterized by X-ray diffraction