• DocumentCode
    1980721
  • Title

    Extended Frequency Range GaAs MESFETs using 0.3μm Gate Lengths

  • Author

    Arnold, J. ; Butlin, R.S.

  • fYear
    1981
  • fDate
    7-11 Sept. 1981
  • Firstpage
    264
  • Lastpage
    269
  • Abstract
    The use of GaAs MESFETs, based on 0.5μm gate length technologies, is now well established up to 18 GHz. However, system requirements are demanding either lower noise performance and/or higher frequencies. This paper describes the technologies necessary to fabricate devices with 0.3μm gate lengths, together with results of d.c. characterisation, detailed r.f. characterisation to 18 GHz and initial results up to 30 GHz. Noise figures of 1.2 dB, 1.5 dB, and 2.1 dB were obtained at 12, 14 and 18 GHz with associated gains of 12.5 dB, 11 dB and 9 dB. At 28 GHz a noise figure of 4.8 dB with 5 dB associated gain was achieved. The effects of cooling on device noise temperature is investigated.
  • Keywords
    Conductivity; Contact resistance; Etching; Frequency; Gain; Gallium arsenide; MESFETs; Metallization; Noise figure; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1981. 11th European
  • Conference_Location
    Amsterdam, Netherlands
  • Type

    conf

  • DOI
    10.1109/EUMA.1981.332965
  • Filename
    4131623