• DocumentCode
    1980981
  • Title

    A fault simulation methodology for MEMS

  • Author

    Rosing, R. ; Richardson, A.M. ; Dorey, A.P.

  • Author_Institution
    Microsyst. Res. Group, Lancaster Univ., UK
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    476
  • Lastpage
    483
  • Abstract
    Efficient built-in and external test strategies are becoming essential in microelectromechanical systems (MEMS), especially for high reliability and safety critical applications. To be realistic however, internal and external test must be properly validated in terms of fault coverage. Fault simulation is hence likely to become a critical utility within the design flow. This paper discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the mixed signal ASIC market
  • Keywords
    failure analysis; fault simulation; micromechanical devices; modelling; FMEA analysis; MEMS; fault coverage; fault simulation methodology; high reliability applications; microelectromechanical systems; safety critical applications; Analytical models; Mechatronics; Microelectromechanical systems; Micromechanical devices; Resonance; Safety; Sensor systems; Springs; System testing; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Automation and Test in Europe Conference and Exhibition 2000. Proceedings
  • Conference_Location
    Paris
  • Print_ISBN
    0-7695-0537-6
  • Type

    conf

  • DOI
    10.1109/DATE.2000.840828
  • Filename
    840828