DocumentCode
1982035
Title
Space-charge dominated beam envelope transport with rotatable axes
Author
Tsiang, Eugene Y.
Author_Institution
400 Davey Glen Road, #4629, Belmont, CA 94002, USA
fYear
1993
fDate
17-20 May 1993
Firstpage
3621
Abstract
In normal paraxial studies of self-interacting accelerator beams, coupling between x- and y-motions that rotate the elliptical beam envelope is considered undesirable. Yet in some applications, such as electron beam lithography and electron beam transmission X-ray computed tomography, external focussing elements cause this coupling by design. To meet this need, the classical 4th order Kapchinskiy-Vladimirsky (KV) differential equations have been generalized to include beam envelope rotation. This set of 10th order generalized envelope equations based on the KV distribution were applied to a 600 mA, 130 keV beam moving through a low-pressure nitrogen gas, where the absence and presence of complete plasma neutralization along its path cause the beam to diverge and converge
Keywords
Differential equations; Electron beams; Electron optics; Lithography; Nitrogen; Optical coupling; Particle beam optics; Particle beams; Plasma applications; Tomography;
fLanguage
English
Publisher
ieee
Conference_Titel
Particle Accelerator Conference, 1993., Proceedings of the 1993
Conference_Location
Washington, DC
Print_ISBN
0-7803-1203-1
Type
conf
DOI
10.1109/PAC.1993.309737
Filename
309737
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