DocumentCode
1985816
Title
Modelling of MEMS optical switches
Author
Shanmugapriya, M. ; Meenakshi, M.
Author_Institution
Coll. of Eng., Guindy, Anna Univ., Chennai, India
fYear
2009
fDate
22-24 Dec. 2009
Firstpage
536
Lastpage
539
Abstract
In this paper, a novel circular structure for MEMS switch is proposed. The MEMS switch is designed to have a movable mirror on a silicon substrate. The tilt of the movable mirror is done by the electrostatic actuator. The electrostatic actuator tilts the mirror to the desired position, so that the optical signals are switched to ON or OFF condition. The performance of the switch is analyzed using INTELLISUITE, MEMS software.
Keywords
electrostatic actuators; micro-optomechanical devices; micromirrors; optical switches; silicon; INTELLISUITE MEMS software; MEMS optical switch; Si; electrostatic actuator; movable mirror; Crystalline materials; Electrostatic actuators; Micromechanical devices; Micromirrors; Microswitches; Mirrors; Optical switches; Polarization; Polymers; Silicon; MEMS; Micromirror; electrostatic actuator;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Trends in Electronic and Photonic Devices & Systems, 2009. ELECTRO '09. International Conference on
Conference_Location
Varanasi
Print_ISBN
978-1-4244-4846-3
Type
conf
DOI
10.1109/ELECTRO.2009.5441047
Filename
5441047
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