• DocumentCode
    1988779
  • Title

    Artwork Generation and Mask Production for Microwave Circuits

  • Author

    March, Steven L. ; Besser, Les

  • Author_Institution
    Compact Software, Inc., 1314 Sam Bass Circle, Round Rock, TX 78664 USA
  • fYear
    1984
  • fDate
    10-13 Sept. 1984
  • Firstpage
    87
  • Lastpage
    96
  • Abstract
    One critical step in the design and manufacture of microwave planar circuits, about which little has been written, is the layout and fabrication of the masks necessary for the production of these circuits. This paper will describe several approaches to the semi-automated artwork generation process and will discuss three different techniques for the actual mask manufacture.
  • Keywords
    Couplers; Design engineering; Fabrication; Manufacturing processes; Microstrip components; Microwave circuits; Microwave generation; Production; Software tools; Transformers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1984. 14th European
  • Conference_Location
    Liege, Belgium
  • Type

    conf

  • DOI
    10.1109/EUMA.1984.333335
  • Filename
    4132017