DocumentCode
1989195
Title
Plasma immersion ion implantation and deposition
Author
You, Y.Z. ; Chun, H.-G. ; Kim, D.I. ; Lee, J.H. ; Cha, B.C. ; Choi, B.K.
Author_Institution
Sch. of Mater. Sci. & Eng., Ulsan Univ., South Korea
fYear
2005
fDate
26 June-2 July 2005
Firstpage
565
Lastpage
567
Abstract
A new PIII&D system is installed to study surface modification of metals, polymer and ceramic at the University of Ulsan, Korea. It is combined with in-situ heating up to 400°C for deeper modified later (∼several hundred microns) and in-situ sputter deposition system with 3 targets. In this paper, we introduce its specification, configuration and the first preliminary results of nitrogen-PIII&D with SKD61 tool steels. In addition, we propose a field of co-work with Russian scientists.
Keywords
ceramics; heating; metals; plasma deposition; plasma immersion ion implantation; polymers; sputter deposition; tool steel; PIII&D system; SKD61 tool steel; ceramics; in-situ heating; ion deposition; ion implantation; metals; plasma immersion; polymers; sputter deposition system; surface modification; Acceleration; Plasma accelerators; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma sources; Plasma temperature; Polymers; Sputtering; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2005. KORUS 2005. Proceedings. The 9th Russian-Korean International Symposium on
Print_ISBN
0-7803-8943-3
Type
conf
DOI
10.1109/KORUS.2005.1507783
Filename
1507783
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