• DocumentCode
    1990333
  • Title

    Organic thin film transistors with printed gate electrodes

  • Author

    Zschieschang, Ute ; Klauk, Hagen ; Halik, Marcus ; Schmid, Gunter ; Radlik, Wolfgang ; Weber, Werner

  • Author_Institution
    Polymer Mater. & Technol., Infineon Technol., Erlangen, Germany
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    191
  • Lastpage
    195
  • Abstract
    We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm2/V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm2/V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.
  • Keywords
    carrier mobility; electroless deposition; insulated gate field effect transistors; nickel; organic semiconductors; photolithography; printing; semiconductor device metallisation; semiconductor technology; spin coating; sputter etching; thin film transistors; Ni; TFT fabrication process; carrier mobility; dry etching; flexible polymeric substrates; low-cost electronic applications; microcontact printing; organic TFTs; organic thin film transistors; pentacene TFTs; photolithography; printed gate electrodes; selective electroless Ni plating; spin-coated polymer gate dielectric layer; Dielectric substrates; Dielectric thin films; Dry etching; Electrodes; Nickel; Organic thin film transistors; Pentacene; Polymer films; Soft lithography; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Polymers and Adhesives in Microelectronics and Photonics, 2002. POLYTRONIC 2002. 2nd International IEEE Conference on
  • Print_ISBN
    0-7803-7567-X
  • Type

    conf

  • DOI
    10.1109/POLYTR.2002.1020209
  • Filename
    1020209