Nanomagnet fabrication on FBAR for magnetic sensor applications

Author

Campanella, Humberto ; Llobet, Jordi ; Duch, Marta ; Esteve, Jaume ; Plaza, José A. ; del Real, R.P. ; Díaz-Michelena, Marina ; Guerrero, Héctor

Author_Institution

Inst. de Microelectron. de Barcelona IMB-CNM, CSIC, Barcelona, Spain

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2166

Lastpage

2169

Abstract

We report a focused-ion-beam-assisted technique intended for ultra-small, hard magnet fabrication and placement on thin-film bulk acoustic resonators (FBAR). Reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of FBARs by ion-beam-induced milling and deposition. Experimental measurements confirm the success of the method. S-parameter extraction was performed before and after nanomagnet attachment. Preliminary finite-element analysis has predicted force sensitivity at fundamental frequencies (kHz-MHz).

Keywords

acoustic resonators; boron alloys; bulk acoustic wave devices; finite element analysis; ion beam assisted deposition; iron alloys; magnetic sensors; milling; nanofabrication; neodymium alloys; permanent magnets; thin film devices; FBAR; FIB assisted technique; NdFeB; NdFeB magnets; S-parameter extraction; finite element analysis; focused ion beam; ion beam induced deposition; ion beam induced milling; magnetic sensor applications; nanomagnet fabrication; thin film bulk acoustic resonators; ultrasmall hard magnet fabrication; Acoustic measurements; Bonding; Fabrication; Film bulk acoustic resonators; Finite element methods; Magnetic analysis; Magnetic sensors; Milling; Scattering parameters; Transistors; Focused Ion Beam (FIB); hard magnet nano-fabrication; thin-film bulk acoustic wave resonator (FBAR);

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441750

Filename

5441750