(yxl)21.82° LiNbO3 pseudo-LFE acoustic wave sensors

Author

Ma, Tingfeng ; Zhang, Zhitian ; Wang, Wenyan ; Zhang, Chao ; Feng, Guanping

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2511

Lastpage

2514

Abstract

Previous studies showed that Lateral field excitation (LFE) devices on AT-cut quartz are sensitive to liquid electrical property changes. However, the sensitivity of the device is limited due to the low piezoelectric coupling factor. In the present study, a pseudo-LFE sensor on (yxl)21.82Â° lithium niobate is investigated both theoretically and experimentally. It is found that the (yxl)21.82Â° LiNbO₃ LFE device works on pseudo-LFE mode with a very high piezoelectric coupling factor of 24.41%, which is almost 3 times higher than that of AT-cut quartz. The experimental result also shows that the device is about 20 times more sensitive to liquid conductivity changes compared to AT-cut quartz LFE devices.

Keywords

bulk acoustic wave devices; lithium compounds; piezoelectric devices; sensitivity; AT-cut quartz; LiNbO3 pseudo-LFE acoustic wave sensor; LiNbO₃; bulk acoustic wave devices; device sensitivity; lateral field excitation devices; liquid electrical property change; lithium niobate; piezoelectric coupling factor; Acoustic sensors; Acoustic waves; Coupling circuits; Electrodes; Lithium niobate; Mechanical factors; Mechanical sensors; Piezoelectric devices; Resonance; Resonant frequency; acoustic wave sensor; lithium niobate; pseudo-lateral field excitation;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441874

Filename

5441874