Micromachined step-tapered high frequency waveguide inserts and antennas

Author

Marconnet, Amy M. ; He, Mike ; Sengele, Sean M. ; Ho, Sung-Jin ; Jiang, Hongrui ; Ferrier, Nicola J. ; van der Weide, D.W. ; Booske, John H.

Author_Institution

Mech. & Electr.&Comput. Eng. Depts., Univ. of Wisconsin - Madison, Madison, WI

fYear

2008

fDate

22-24 April 2008

Firstpage

22

Lastpage

23

Abstract

Applications of high frequency radiation, in the ranges of 30-300 GHz (millimeter-wave) and 300-1000 GHz (terahertz), require the development of specialized components, specifically low-loss waveguides and antennas. Conventional waveguide antennas must be flared in both lateral dimensions requiring a large space and are challenging to fabricate. Previous work has shown the promise of tapered dielectric rod antennas for their high transmission and ease of integration into waveguide systems. However, practical repeatable machining techniques are neglected. This work develops the design, manufacturing, and analysis of step-tapered waveguide inserts and antennas, fabricated via controlled acid etching of high resistivity silicon, optimized for good transmission in the range of 75-110 GHz.

Keywords

etching; millimetre wave antennas; submillimetre wave antennas; waveguide antennas; acid etching; frequency 30 GHz to 1000 GHz; high frequency radiation; micromachining; step-tapered high frequency waveguide inserts; tapered dielectric rod antennas; waveguide antennas; Antenna accessories; Conductivity; Dielectrics; Etching; Frequency; Machining; Manufacturing; Millimeter wave technology; Transmitting antennas; Waveguide components;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics Conference, 2008. IVEC 2008. IEEE International

Conference_Location

Monterey, CA

Print_ISBN

978-1-4244-1715-5

Type

conf

DOI

10.1109/IVELEC.2008.4556324

Filename

4556324