Novel fabrication process for transverse and longitudinal mode PZT actuators

Author

Misri, Isaac ; Hareesh, Prakruthi ; Yang, Shuang ; DeVoe, Don L.

Author_Institution

Mech. Eng., Univ. of Maryland, College Park, MD, USA

fYear

2012

fDate

27-27 March 2012

Firstpage

1

Lastpage

5

Abstract

Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.

Keywords

etching; lead compounds; microfabrication; photoresists; piezoelectric actuators; piezoelectric transducers; powder technology; PZT; bulk PZT sheets; bulk PZT transducers; dry film photoresist; etch time; functional piezoelectric actuator fabrication; longitudinal mode PZT actuators; micro powder blasting; powder blasting parameters; transverse mode PZT actuators; Actuators; Anisotropic magnetoresistance; Etching; Films; Powders; Resists; Substrates; Fabrication; Piezoelectric Actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Conference_Location

Annapolis, MD

Print_ISBN

978-1-4673-1781-8

Type

conf

DOI

10.1109/MAMNA.2012.6195097

Filename

6195097