DocumentCode

2006475

Title

Multilayer Vertical Stacked Capacitors (mvstc) for 64mbit and 256mbit Drams

Author

Temmler, D.

Author_Institution

Institute of Semiconductor Physics, Germany

fYear

1991

fDate

28-30 May 1991

Firstpage

13

Lastpage

14

Keywords

Capacitance; Capacitors; Cleaning; Dielectrics; Doping; Etching; Nonhomogeneous media; Oxidation; Random access memory; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

conf

DOI

10.1109/VLSIT.1991.705966

Filename

705966