DocumentCode
2008654
Title
Design and simulation of humidity micro-sensors structure based on Polymers
Author
Suchánek, Pavel ; Husák, Miroslav
Author_Institution
Fac. of Electr. Eng., Czech Tech. Univ., Prague
fYear
2006
fDate
Oct. 2006
Firstpage
189
Lastpage
192
Abstract
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezoresistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on microcantilever which forms sensing part of sensor
Keywords
humidity sensors; microsensors; polymers; CoventorWare; humidity microsensors; mechanical simulation; piezoresistive simulation; polymers structure; Capacitive sensors; Conducting materials; Conductivity; Humidity; Light emitting diodes; Mechanical sensors; Micromechanical devices; Polymers; Silicon; Strain measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on
Conference_Location
Smolenice Castle
Print_ISBN
1-4244-0369-0
Type
conf
DOI
10.1109/ASDAM.2006.331186
Filename
4133110
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