Patternable pyrolyzed carbon microspeaker

This paper presents pyrolyzed carbon microspeakers. Input AC current induces periodic heat emission on the carbon structure. And this leads to the change of pressure distribution around it, which makes acoustic waves. Suggested microspeaker has an advantage of easy patterning and aligning because it uses photolithography and pyrolysis process. Simple structure makes the speaker of thin layer possible, and this is favorable for transparency. Different types of carbon speakers are made and compared. It shows that making carbon microstructure such as pillar arrays can improve the performance of the speaker. The potentiality of pyrolyzed carbon as a speaker is shown.