Selective-emitter-enhanced micro thermophotovoltaic power generation system

Author

Kirikae, Daizen ; Suzuki, Yuji ; Kasagi, Nobuhide

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

1195

Lastpage

1198

Abstract

Ti-coated Si microcavities with extremely-smooth sidewalls has been developed using DRIE and vacuum arc evaporation for improvement of energy conversion efficiency of micro thermophotovoltaic system. For 1.8 Â¿m microcavities, the peaks in emittance spectra correspond well to the electromagnetic resonance modes. Micro cavities designed for Ge photovoltaic cells are also successfully microfabricated. It is found that estimates of the energy conversion efficiency of Ge PV cell are increased to 6.4 % and 13 % respectively for the emitter temperature of 900 and 1200 Â°C.

Keywords

electric power generation; evaporation; microcavities; photovoltaic cells; photovoltaic power systems; sputter etching; vacuum arcs; DRIE; Ge photovoltaic cells; Ti-coated Si microcavity; electromagnetic resonance modes; emittance spectra; energy conversion efficiency; micro thermophotovoltaic system; selective-emitter-enhanced micro thermophotovoltaic power generation system; vacuum arc evaporation; Elementary particle vacuum; Energy conversion; Microcavities; Photovoltaic cells; Photovoltaic systems; Power generation; Resonance; Temperature; Vacuum arcs; Vacuum systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442426

Filename

5442426