3D fluid simulation of rectangular TCP source

Summary form only given, as follows. Large area rectangular TCP (transformer coupled plasma) sources have been widely applied to manufacture processes of display devices such as LCD (liquid crystal display) and PDP (plasma display panel). In the present, work, a three-dimensional fluid simulator of rectangular TCP source is developed. Two fluid equations for charged particles are solved numerically using the dielectric relaxation scheme and FDM (finite difference method). The electron heating model, which yields local power absorption profile for electron temperature equation, is constructed based on the Maxwell-Boltzmann equations and a simplified plasma surface impedance. Various simulation results of charged particle densities, electron temperature, and electrostatic potential are obtained and presented for argon discharge under various conditions of RF (radio frequency) power and neutral gas pressure.