Plasma source based on arc discharge with cold hollow cathode

Author

Akhmadeev, Y.H. ; Grigoriev, S.V. ; Koval, N.N. ; Lopatin, Igor V. ; Schanin, P.M. ; Vershinin, D.S.

Author_Institution

Inst. of High Current Electron., Tomsk, Russia

fYear

2003

fDate

5-5 June 2003

Firstpage

203

Abstract

Summary form only given, as follows. In a low-pressure arc discharge a dense low-temperature plasma is effectively generated. This plasma finds an application, both in scientific examinations, and in technological purposes. One of the essential disadvantages restricting technological application of an arc discharge with a cathode spot is the presence of a considerable part of a micro-droplet fraction in a plasma flow. In the report the construction, operating principle and main characteristics of an arc plasma source for producing a homogeneous gas-discharge plasma with microdroplet fraction in big vacuum volumes is given. The plasma source is based on an arc discharge with a cathode spot.

Keywords

arcs (electric); glow discharges; arc discharge; cathode spot; cold hollow cathode; plasma source; Arc discharges; Cathodes; Electron emission; Ferroelectric materials; Ionization; Plasma applications; Plasma density; Plasma properties; Plasma sources; Surface discharges;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Conference_Location

Jeju, South Korea

ISSN

0730-9244

Print_ISBN

0-7803-7911-X

Type

conf

DOI

10.1109/PLASMA.2003.1228682

Filename

1228682