Influence of the excitation frequency and discharge current on atmosphere pressure plasmas for modification of material surfaces

Summary form only given, as follows. The work presented in this paper focuses on characterization of a new plasma source and finding a good condition for modification of material surfaces. Spectral data of plasma emission, discharge current and voltage have been used for diagnosing plasma parameters such as plasma electron density, electron temperature and plasma instability. The nonlinear relationship between discharge current and voltage is obtained. Based on the results above, our new plasma source has been used for modifying the surfaces of different materials. The structural characterization of those surfaces was conducted using an electron microscope, X-ray diffraction, X-ray photoelectron spectroscopy. New features of the surface after modification have been obtained.