Microwave assisted plasma generation from a hybrid coaxial TE011 resonator

Summary form only given, as follows. Atmospheric plasma generation from a 3kW, 2.45 GHz magnetron is investigated The system consists of a 2.45 GHz magnetron, circulator, dummy load, a three-stub impedance matching network, and a hybrid coaxial TE011 resonator. The resonator is designed to excite a TE011 at 2.45 GHz through a three coupling on a TE311 coaxial cavity, which is connected to a WR-284 rectangular waveguide. The resonator quality factor is measured to be 200 before it is tuned, which is in good agreement with HFSS simulation results. A large-area argon plasma generation is observed in a TE011 coaxial resonator. The plasma volume is an annular configuration which is consistent with the TE011 electric field shape. Experiments show stable plasma generation up to 1 Torr.