DocumentCode
2016196
Title
A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities
Author
Yie, H. ; Bart, S.F. ; White, J. ; Senturia, S.D.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
128
Keywords
Acceleration; Accelerometers; Capacitors; Computational modeling; Electromechanical sensors; Electrostatic analysis; Fabrication; Fingers; Residual stresses; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472541
Filename
472541
Link To Document