A Piecewise Response Surface Method for Simulating MEMS with Uncertain Parameters

This paper addresses the simulation and the modeling of MEMS with uncertain parameters. It focuses on an original technique derived from the piecewise perturbation method (PPM), called the piecewise response surface (PRS) method. This approach is described from a theoretical point of view. Results obtained with the PRS method and with Monte-Carlo are compared and commented in the case of a MEMS accelerometer with uncertain stiffness. The implementation of the PRS in the case of many uncertain parameters is discussed.