DocumentCode
2016273
Title
Modeling and Experiments of Input-Output Displacement Relations for a Piezoelectric Nanopositioner
Author
Wu, Lin ; Sun, Qiao
Author_Institution
University of Calgary
fYear
2004
fDate
25-27 Aug. 2004
Firstpage
453
Lastpage
460
Abstract
Existing commercially available long range piezoelectric actuators have limited load carrying capacity due to the fact that frictions are used as the load bearing mechanism. In order to improve the load carry capacity for long range piezoelectric actuators with nanometer resolutions, a novel design that employs the self-lock concept has been reported. In this paper, we study the input-output displacement relations for this new design. In particular, we investigate the losses of the actuator displacement due to elastic deformations when a large force is applied. For a given load, a minimum value exists for the stroke command to ensure a non-zero output displacement. A positioning strategy was proposed to achieve a nanometer scale positioning process in a long distance. Experimental results were also given to support the analysis.
Keywords
Fasteners; Friction; Instruments; Micromotors; Nanopositioning; Piezoelectric actuators; Rotors; Stators; Sun; Ultrasonic variables measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7695-2189-4
Type
conf
DOI
10.1109/ICMENS.2004.1508993
Filename
1508993
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