• DocumentCode
    2017436
  • Title

    Scanning infrared microscope

  • Author

    Mzhelskiy, Ivan V. ; Polovinkin, Vladimir G.

  • Author_Institution
    Novosibirsk State Tech. Univ., Novosibirsk, Russia
  • fYear
    2010
  • fDate
    June 30 2010-July 4 2010
  • Firstpage
    447
  • Lastpage
    448
  • Abstract
    Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
  • Keywords
    optical microscopes; photodetectors; scanning probe microscopy; photo detector; scanning infrared microscope; Lead; Seminars; Infrared; SIRM; microscope;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-6626-9
  • Type

    conf

  • DOI
    10.1109/EDM.2010.5568758
  • Filename
    5568758