DocumentCode
2017436
Title
Scanning infrared microscope
Author
Mzhelskiy, Ivan V. ; Polovinkin, Vladimir G.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2010
fDate
June 30 2010-July 4 2010
Firstpage
447
Lastpage
448
Abstract
Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
Keywords
optical microscopes; photodetectors; scanning probe microscopy; photo detector; scanning infrared microscope; Lead; Seminars; Infrared; SIRM; microscope;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-6626-9
Type
conf
DOI
10.1109/EDM.2010.5568758
Filename
5568758
Link To Document