• DocumentCode
    2018073
  • Title

    Application Of Heterodyne Interferometry To Scanning Coherent Optical Microscopy

  • Author

    Cho, Kyuman ; Mazzoni, David L. ; Davis, Christopher C.

  • Author_Institution
    University of Maryland
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    327
  • Lastpage
    328
  • Keywords
    Focusing; Frequency; Image resolution; Optical interferometry; Optical microscopy; Optical mixing; Probes; Rough surfaces; Scanning electron microscopy; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693974
  • Filename
    693974
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2018073