Integration of conducting polymer micro- and nano-actuators with semiconductor photonic devices

Author

Berdichevsky, Yevgeny ; Lo, Y.H.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., San Diego, CA, USA

Volume

2

fYear

2004

fDate

7-11 Nov. 2004

Firstpage

507

Abstract

In this work, PPy (polypyrrole) doped with DBS (dodecylbenzenesulfonate) anions is used as actuators or "artificial muscles". Microactuators described in this study are fabricated by electrochemically polymerizing PPy on patterned Au thin film deposited on a Si pn junction. A PPy nanostructure has been fabricated on a semiconductor substrate, enabling future integration with electronic or photonic devices.

Keywords

conducting polymers; electrochemistry; gold; integrated optics; integrated optoelectronics; metallic thin films; microactuators; nanostructured materials; nanotechnology; optical variables control; p-n junctions; polymerisation; semiconductor devices; silicon; Au; PPy nanostructure; Si; Si pn junction; artificial muscles; conducting polymer; device integration; dodecylbenzenesulfonate anions; electrochemical polymerization; electronic devices; microactuators; nanoactuators; nanostructure fabrication; optically controlled microactuator; patterned Au thin film; polypyrrole; semiconductor photonic devices; semiconductor substrate; Actuators; Gold; Microactuators; Muscles; Nanoscale devices; Polymer films; Satellite broadcasting; Semiconductor thin films; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE

Print_ISBN

0-7803-8557-8

Type

conf

DOI

10.1109/LEOS.2004.1363335

Filename

1363335