DocumentCode
2023928
Title
DEEMO: a new technology for the fabrication of microstructures
Author
Elders, J. ; Jansen, H.V. ; Elwenspoek, M. ; Ehrfeld, W.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
238
Keywords
Anisotropic magnetoresistance; Dry etching; Electrostatic actuators; Embossing; Fabrication; Microstructure; Optical materials; Silicon; Technological innovation; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472573
Filename
472573
Link To Document