DocumentCode
2024610
Title
Measurement and modelling of low resistivity silicon substrate coplanar-strip (CPS) waveguides made in standard silicon technology
Author
Berg, H. ; Jacobsson, H. ; Berg, K. ; Schuppen, A. ; Gevorgian, S.
Author_Institution
Chalmers Univ. of Technol., Goteborg, Sweden
fYear
2000
fDate
28-28 April 2000
Firstpage
91
Lastpage
94
Abstract
A method to reduce the losses in coplanar transmission lines on silicon is presented. It is based on optimization of the cross section of the transmission line and does not require the introduction of new processing steps.
Keywords
MMIC; coplanar transmission lines; electrical resistivity; elemental semiconductors; equivalent circuits; losses; silicon; strip lines; substrates; transmission line theory; Si; Si MMICs; coplanar transmission lines; coplanar-strip waveguides; losses reduction; low resistivity Si substrate; microwave losses; modelling; standard Si technology; transmission line cross section optimisation; Conductivity; Coplanar transmission lines; Coplanar waveguides; Fabrication; Frequency; Jacobian matrices; MMICs; Silicon; Strips; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Monolithic Integrated Circuits in RF Systems, 2000. Digest of Papers. 2000 Topical Meeting on
Conference_Location
Garmisch, Germany
Print_ISBN
0-7803-6255-1
Type
conf
DOI
10.1109/SMIC.2000.844306
Filename
844306
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