DocumentCode
2025443
Title
Deformable MEMS micromirror array for wavelength and angle insensitive retroreflecting modulators
Author
Chan, T.K. ; Ford, J.E.
Author_Institution
Dept. of Electr. & Comput. Eng., California Univ., San Diego, CA, USA
Volume
2
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
1007
Abstract
We demonstrate a large-aperture, angle-insensitive MEMS modulator that switches from flat to a reflective microlens array. We measure 10 dB contrast with 0.55 μm sag, and calculate 0.8 μm sag will produce 20 dB contrast.
Keywords
microlenses; micromechanical devices; micromirrors; optical arrays; optical links; optical modulation; angle insensitive retroreflecting modulators; deformable MEMS micromirror array; microlens array; wavelength insensitive retroreflecting modulators; Apertures; Diffraction; Lenses; Lighting; Micromechanical devices; Micromirrors; Microoptics; Mirrors; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363588
Filename
1363588
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