DocumentCode
2028467
Title
Fluid micropumps based on rotary magnetic actuators
Author
Ahn, Chong H. ; Allen, Mark G.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
408
Keywords
Control systems; Fluid flow; Fluid flow control; Frequency; Magnetic liquids; Microelectronics; Micromagnetics; Micropumps; Pneumatic actuators; Pumps;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472590
Filename
472590
Link To Document