• DocumentCode
    2031193
  • Title

    Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

  • Author

    Li, L. ; Ishii, K. ; Tsutsui, Y. ; Shoji, S. ; Mizuno, J.

  • Author_Institution
    Major in Nano-Sci. & Nano-Eng., Waseda Univ., Tokyo, Japan
  • fYear
    2012
  • fDate
    5-8 March 2012
  • Firstpage
    27
  • Lastpage
    30
  • Abstract
    In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 × 100 mm2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.
  • Keywords
    microlenses; moulding; optical arrays; optical fabrication; pressing; quartz; rolling; SiO2; flexible replica mold; microlens array replication; quartz substrate; roll press UV imprint process development; size 0.15 mm; Fabrication; Resins; UV imprint; flexible replica mold; micro lens arrays; quartz substrate; roll press UV imprint system;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4673-1122-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2012.6196715
  • Filename
    6196715
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2031193