DocumentCode
2032027
Title
Experimental Evaluation of Second Harmonic Generation for Non-Invasive Contamination Detection in SOI Wafers
Author
Alles, Michael L. ; Schrimpf, Ronald D. ; Fleetwood, Daniel M. ; Pasternak, Robert ; Tolk, Norman H. ; Standley, Robert W.
Author_Institution
Vanderbilt Univ., Nashville, TN
fYear
2006
fDate
22-24 May 2006
Firstpage
1
Lastpage
6
Abstract
We report experimental results from non-invasive second harmonic generation (SHG) measurements applied to detect the presence of contamination at the silicon/buried oxide (BOX) and BOX/substrate interfaces in silicon-on-insulator (SOI) wafers. The potential application of SHG as a metrology tool for process control is demonstrated
Keywords
contamination; harmonic generation; process control; silicon-on-insulator; SOI wafers; Si; buried oxide; noninvasive contamination detection; process control; second harmonic generation; silicon on insulator; Contamination; Frequency conversion; Metrology; Optical harmonic generation; Plasma measurements; Pollution measurement; Pulse measurements; Semiconductor materials; Silicon on insulator technology; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE
Conference_Location
Boston, MA
ISSN
1078-8743
Print_ISBN
1-4244-0254-9
Type
conf
DOI
10.1109/ASMC.2006.1638714
Filename
1638714
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