DocumentCode
2033008
Title
Piezoelectric impact force sensor array for tribological research on rigid disk storage media
Author
Burger, G.J. ; Lammerink, T.S.J. ; Fluitman, J.H.J. ; Imai, S. ; Tokuyama, M. ; Hirose, S.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
294
Keywords
Electrodes; Force measurement; Force sensors; Frequency; Mechanical sensors; Memory; Piezoelectric films; Sensor arrays; Surface waves; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472607
Filename
472607
Link To Document