DocumentCode
2034185
Title
The vertical MSM diamond X-ray detector
Author
Cheirsirikul, S. ; Jesen, S. ; Hruanun, C.
Author_Institution
Dept. of Electron. Eng., KMITL, Bangkok, Thailand
fYear
2012
fDate
5-8 March 2012
Firstpage
587
Lastpage
590
Abstract
Development synthesizing diamond film on (100) silicon substrate was processed by HFCVD (Hot Filament Chemical Vapor Deposition). The processes consisted of using methane (CH4) to produce intrinsic diamond and built MSM device on the diamond film. The top and the bottom of diamond is Schottky junctions were produced by aluminum which caused the carriers were able to move in the vertical direction to reduce the effect of grain boundaries. After that, the result of detecting an X-ray of MSM diamond was satisfactory because it could respond along with increasing of intensity of an X-ray and X-ray expose time.
Keywords
X-ray detection; chemical vapour deposition; diamond; C; HFCVD; Schottky junction; Si; diamond film synthesis; grain boundary effect; hot filament chemical vapor deposition; vertical MSM diamond X-ray detector; Aluminum; Diamond-like carbon; Films; Presses; Scholarships; Silicon; X-ray sensor; diamond-film fabrication; vertical MSM diamond;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location
Kyoto
Print_ISBN
978-1-4673-1122-9
Type
conf
DOI
10.1109/NEMS.2012.6196844
Filename
6196844
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