Design and simulation of RF MEMS cantilever and bridge switches for high switching speed and low voltage operation and their comparison

Author

Saha, Shimul Chandra ; Singh, Tajeshwar ; Sasther, T.

Author_Institution

Dept. of Electron. & Telecommun., Norwegian Univ. of Sci. & Technol., Trondheim, Norway

Volume

1

fYear

2005

fDate

14-15 July 2005

Firstpage

131

Abstract

In this paper we present the design and simulations of RF MEMS cantilever and bridge switches with regard to their switching speed and pull-down voltage. The switches are required to fulfil the requirements of high speed and a moderate pull down voltage for the switching of capacitive micromachined ultrasonic transducer (CMUT) elements used for ultrasound imaging. The switch type can be either capacitive contact or DC contact, depending on the operating frequency requirement.

Keywords

biomedical imaging; capacitive sensors; micromachining; microswitches; microwave switches; ultrasonic transducers; CMUT; DC contact; RF MEMS switches; bridge switches; cantilever switches; capacitive contact; capacitive micromachined ultrasonic transducer; low voltage operation; pull down voltage; switching speed; ultrasound imaging; Bridge circuits; Contacts; Low voltage; Probes; Radio frequency; Radiofrequency microelectromechanical systems; Signal processing; Switches; Telecommunication switching; Ultrasonic imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Signals, Circuits and Systems, 2005. ISSCS 2005. International Symposium on

Print_ISBN

0-7803-9029-6

Type

conf

DOI

10.1109/ISSCS.2005.1509868

Filename

1509868