DocumentCode
2036383
Title
Characterization of silicon nanowires grown by electroless etching
Author
Mertens, Robert G. ; Sundaram, Kalpathy B.
Author_Institution
Sch. of Electr. & Comput. Eng., Univ. of Central Florida, Orlando, FL, USA
fYear
2012
fDate
15-18 March 2012
Firstpage
1
Lastpage
5
Abstract
Silicon nanowires (SiNWs) were created using the electroless etching technique using silver nitrate (AgNO3)/hydrofluoric acid (HF) solution. More than 200 samples were created using various methods, concentrations and techniques, producing some consistent results and revealing some random properties. SEM images were taken of many samples, showing various stages of growth and the results of the various techniques used to grow the SiNWs. These images and experiments show that previous notions on the growth of SiNWs may be misunderstood. The experiments performed and the images taken show that SiNWs growth process is highly randomized, starting at the beginning of the etch with no SiNWs, and ending with SiNWs branching away from a centralized agglomeration made up of corrugated, ribbonized Silicon (Si). Process and SEM stage images are provided, including dendrite blankets.
Keywords
dendrites; elemental semiconductors; etching; nanofabrication; nanowires; scanning electron microscopy; semiconductor growth; silicon; SEM image; agglomeration; dendrite blanket; electroless etching technique; silicon nanowire; Etching; Nanowires; Oxidation; Potential well; Silicon; Silver; Water;
fLanguage
English
Publisher
ieee
Conference_Titel
Southeastcon, 2012 Proceedings of IEEE
Conference_Location
Orlando, FL
ISSN
1091-0050
Print_ISBN
978-1-4673-1374-2
Type
conf
DOI
10.1109/SECon.2012.6196946
Filename
6196946
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