• DocumentCode
    2036383
  • Title

    Characterization of silicon nanowires grown by electroless etching

  • Author

    Mertens, Robert G. ; Sundaram, Kalpathy B.

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Univ. of Central Florida, Orlando, FL, USA
  • fYear
    2012
  • fDate
    15-18 March 2012
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    Silicon nanowires (SiNWs) were created using the electroless etching technique using silver nitrate (AgNO3)/hydrofluoric acid (HF) solution. More than 200 samples were created using various methods, concentrations and techniques, producing some consistent results and revealing some random properties. SEM images were taken of many samples, showing various stages of growth and the results of the various techniques used to grow the SiNWs. These images and experiments show that previous notions on the growth of SiNWs may be misunderstood. The experiments performed and the images taken show that SiNWs growth process is highly randomized, starting at the beginning of the etch with no SiNWs, and ending with SiNWs branching away from a centralized agglomeration made up of corrugated, ribbonized Silicon (Si). Process and SEM stage images are provided, including dendrite blankets.
  • Keywords
    dendrites; elemental semiconductors; etching; nanofabrication; nanowires; scanning electron microscopy; semiconductor growth; silicon; SEM image; agglomeration; dendrite blanket; electroless etching technique; silicon nanowire; Etching; Nanowires; Oxidation; Potential well; Silicon; Silver; Water;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Southeastcon, 2012 Proceedings of IEEE
  • Conference_Location
    Orlando, FL
  • ISSN
    1091-0050
  • Print_ISBN
    978-1-4673-1374-2
  • Type

    conf

  • DOI
    10.1109/SECon.2012.6196946
  • Filename
    6196946