Queueing network analysis for an IC foundry

Author

Juang, Jia-Yang ; Huang, Han-Pang

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

4

fYear

2000

fDate

2000

Firstpage

3389

Abstract

A hybrid decomposed queueing network model is developed based on actual operating data from one particular foundry fabrication (fab) for rapid analysis of several performance measures. The queueing model includes analyzer and predictor modules. The system analyzer module provides the analysis of arrival pattern and service pattern for each tool group. The system predictor module provides the forecast of important performance measures, such as products cycle time, lots remaining cycle time, tool utilization, queueing length, tool moves, stage moves. In addition, a modularized system, QFAB, is designed to implement the model proposed. A systematic analysis of arrival pattern and service pattern for tool groups is proposed. An approach to compute the effective tool number for tool groups is also addressed. Based on the analysis, the supervisors can gain more insights and choose the proper queueing models. Comparing the obtained results to the actual fab data, the accuracy of prediction of cycle time is satisfactory

Keywords

integrated circuit manufacture; production control; queueing theory; IC foundry; IC manufacture; analyzer module; predictor module; production control; products cycle time; queueing network model; tool utilization; Accuracy; Fabrication; Foundries; Length measurement; Particle measurements; Pattern analysis; Performance analysis; Predictive models; Queueing analysis; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on

Conference_Location

San Francisco, CA

ISSN

1050-4729

Print_ISBN

0-7803-5886-4

Type

conf

DOI

10.1109/ROBOT.2000.845242

Filename

845242