• DocumentCode
    2041779
  • Title

    Suppression of mechanical coupling for parallel beam gyroscope

  • Author

    Sato, Hiroshi ; Fukuda, Toshio ; Arai, Fumihito ; Itoigawa, Kouichi ; Tsukahara, Yasuhisa

  • Author_Institution
    Dept. of Micro Syst. Eng., Nagoya Univ., Japan
  • Volume
    4
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    3939
  • Abstract
    A parallel beam structure has many significant features, as follows. (i) The tip moves in parallel at the end. (ii) This structure converts a small displacement into a concentrated large strain. (iii) Each unit doesn´t interfere with the other units by piling up structures. (iv) The lateral rigidity is high. We propose this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In this paper is shown the method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close together. Then we propose the suppression method of the mechanical coupling that arises by bringing two resonance frequencies close. From this result, this structure suits for the gyroscope. Experimental results are shown
  • Keywords
    angular velocity measurement; gyroscopes; piezoelectric transducers; resonance; angular rate sensor; drive resonance frequency; lateral rigidity; mechanical coupling suppression; parallel beam gyroscope; parallel tip motion; piezoelectric vibrating gyroscope; sensing resonance frequency; Capacitive sensors; Costs; Force sensors; Gyroscopes; Optical coupling; Piezoelectric effect; Resonance; Resonant frequency; Robotics and automation; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on
  • Conference_Location
    San Francisco, CA
  • ISSN
    1050-4729
  • Print_ISBN
    0-7803-5886-4
  • Type

    conf

  • DOI
    10.1109/ROBOT.2000.845345
  • Filename
    845345