Properties of AlN-TiB2-TiSi2 coating system obtained by magnetron sputterring

Author

Azarenkov, N.A. ; Pshyk, A.V. ; Sobol, O.V. ; Beresnev, V.M. ; Turbin, P.V. ; Lytovchenko, S.V. ; Kolesnikov, D.A.

Author_Institution

V.N. Karazin Kharkiv Nat. Univ., Kharkiv, Ukraine

fYear

2013

fDate

8-14 Sept. 2013

Firstpage

824

Lastpage

825

Abstract

The coatings investigated in this paper were deposited via the magnetron sputtering of AlN-TiB₂-TiSi₂ target in Ar atmosphere. The investigation of structural-phase composition, element composition, morphology and mechanical properties before and after annealing up to 1350 °C was carried out. The concentration of elements in the coating were changed after annealing under 900°C and further annealing under 1350 °C (especially after annealing under 1350°C).The hardness of as-deposited coatings was 15 GPa, but after the annealing under 1350 °C the value of hardness was increased up to (22...23.5) GPa. The value of a viscoplasticity index was 0.07. All this provides high damping properties of the coating, and the amorphous-like structure makes promising the use of these coatings as diffusion barriers in the form of independent elements, and as a contacting layer in multilayer wear resistant coatings.

Keywords

III-V semiconductors; aluminium compounds; annealing; crystal morphology; damping; diffusion barriers; hardness; sputter deposition; sputtered coatings; titanium compounds; viscoplasticity; wear resistant coatings; wide band gap semiconductors; AlN-TiB₂-TiSi₂; amorphous like structure; annealing; damping property; deposited coating hardness; diffusion barrier; element composition; magnetron sputtering coating; mechanical property; morphology; multilayer wear resistant coating; structural phase composition; temperature 1350 degC; viscoplasticity index; Amorphous magnetic materials; Annealing; Coatings; Educational institutions; Electronic mail; Magnetic multilayers; Magnetomechanical effects;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference

Conference_Location

Sevastopol

Print_ISBN

978-966-335-395-1

Type

conf

Filename

6653080