DocumentCode
2044245
Title
Post Treatment of Screen-Printed Carbon Nanotubes Emitter by Plasma Etching
Author
Yu, Jun ; Chen, Jun ; Deng, S.Z. ; Xu, N.S.
Author_Institution
State Key Lab. of Optoelectron. Mater. & Technol., Sun Yat-sen Univ., Guangzhou
fYear
2006
fDate
38899
Firstpage
365
Lastpage
366
Abstract
The effect of post-deposition plasma etching on the field emission properties of screen-printed multiwalled carbon nanotube electron emitter arrays is investigated. Results prove that short time etching can effectively remove parts of the inorganic binder, aligns the carbon nanotubes and improve field emission properties
Keywords
carbon nanotubes; field emitter arrays; plasma materials processing; sputter etching; C; electron emitter arrays; field emission; inorganic binder; post deposition plasma etching; screen printed multiwalled carbon nanotubes; Carbon nanotubes; Etching; Organic materials; Plasma applications; Plasma displays; Plasma materials processing; Plasma temperature; Scanning electron microscopy; Slurries; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location
Guilin
Print_ISBN
1-4244-0401-0
Type
conf
DOI
10.1109/IVNC.2006.335220
Filename
4134611
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