DocumentCode
2044842
Title
Stable Electron Emission from Graphite-Nanoneedles and Their Application to Scanning Electron Microscopes
Author
Matsumoto, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori
Author_Institution
R&D Center, Stanley Electr. Corp., Tsukuba
fYear
2006
fDate
38899
Firstpage
411
Lastpage
412
Abstract
The authors demonstrate both the stable and high brightness field emission from graphite nanoneedle (GRANN) cathode fabricated by simple plasma etching of a graphite rod. Bright electron emission of the order of 1012 Asr-1m-2) is obtained from GRANN cathode. As well as the bright emission, a stable emission under high residual pressure (10-5 torr) is obtained by lightly heating the GRANN cathode (Thermal-FE operation). The performance of the GRANN cathode is demonstrated by the construction of an FE scanning electron microscope (SEM) with the GRANN cathode and clear FE-SEM images are obtained at high residual pressure of the order of 10-5 torr
Keywords
brightness; cathodes; electron field emission; graphite; nanostructured materials; scanning electron microscopes; sputter etching; vacuum microelectronics; C; FE scanning electron microscope; SEM; brightness; electron emission stability; graphite nanoneedle cathode; graphite rod; heating; plasma etching; residual pressure; thermal-FE operation; Brightness; Cathodes; Electron emission; Etching; Heating; Hydrogen; Iron; Plasma applications; Plasma temperature; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location
Guilin
Print_ISBN
1-4244-0401-0
Type
conf
DOI
10.1109/IVNC.2006.335242
Filename
4134634
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