• DocumentCode
    2044842
  • Title

    Stable Electron Emission from Graphite-Nanoneedles and Their Application to Scanning Electron Microscopes

  • Author

    Matsumoto, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori

  • Author_Institution
    R&D Center, Stanley Electr. Corp., Tsukuba
  • fYear
    2006
  • fDate
    38899
  • Firstpage
    411
  • Lastpage
    412
  • Abstract
    The authors demonstrate both the stable and high brightness field emission from graphite nanoneedle (GRANN) cathode fabricated by simple plasma etching of a graphite rod. Bright electron emission of the order of 1012 Asr-1m-2) is obtained from GRANN cathode. As well as the bright emission, a stable emission under high residual pressure (10-5 torr) is obtained by lightly heating the GRANN cathode (Thermal-FE operation). The performance of the GRANN cathode is demonstrated by the construction of an FE scanning electron microscope (SEM) with the GRANN cathode and clear FE-SEM images are obtained at high residual pressure of the order of 10-5 torr
  • Keywords
    brightness; cathodes; electron field emission; graphite; nanostructured materials; scanning electron microscopes; sputter etching; vacuum microelectronics; C; FE scanning electron microscope; SEM; brightness; electron emission stability; graphite nanoneedle cathode; graphite rod; heating; plasma etching; residual pressure; thermal-FE operation; Brightness; Cathodes; Electron emission; Etching; Heating; Hydrogen; Iron; Plasma applications; Plasma temperature; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
  • Conference_Location
    Guilin
  • Print_ISBN
    1-4244-0401-0
  • Type

    conf

  • DOI
    10.1109/IVNC.2006.335242
  • Filename
    4134634