• DocumentCode
    2046964
  • Title

    Perspective technologies and methods in MEMS design

  • fYear
    2008
  • fDate
    21-24 May 2008
  • Firstpage
    2
  • Lastpage
    3
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
  • Conference_Location
    Polyana
  • Print_ISBN
    978-966-2191-00-4
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2008.4558719
  • Filename
    4558719
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2046964