DocumentCode
2049515
Title
Carbon overlayer for 3-D pole metrology
Author
Pei Zou ; Nadeau, J.P. ; Arjavac, J.H.
Author_Institution
FEI Co., Hillsboro, OR, USA
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, W overlayer, in addition to protecting the pole during milling, is to provide the contrast necessary for pole edge recognition. The cross section with W overlayer frequently suffers from the "curtaining" problem, where visible black lines at the W/NiFe interface cause the pole metrology software.
Keywords
Monte Carlo methods; carbon; ferromagnetic materials; focused ion beam technology; iron alloys; nickel alloys; surface topography; tungsten; 3-D pole metrology; C; W-NiFe; W/NiFe interface; carbon overlayer; milling; pole edge; pole metrology software; visible black lines; Ion beams; Magnetic heads; Manufacturing processes; Metrology; Milling; Pattern recognition; Process control; Protection; Shape; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230585
Filename
1230585
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